Microelectronics Group is a part of the Department of Electrical Engineering at Indian Institute of Technology, Bombay (IIT Bombay).

Some Recent & Ongoing Projects

Silicon sensors for electroporation (Praman Technology) .
Channel engineering for 100 nm CMOS devices (DST) .
Characterization of vertical MOS transistors (Siemens) .
Design and characterization of Flash memories (Hitachi)

Microelectronics Teaching and Research (Ministry of Human Resource Development)

Radiation Effects on MOS Devices (Department of Electronics)

Vertical MOS Transistors (jointly with Universtat der Bundeswehr Munchen) (Siemens AG, Germany)

Accelerated Testing of Electronic Devices (Department of Atomic Energy)

An evaluation of the use of Bulk DTMOS technology in integrated circuits


Facilities :
Oxidation/diffusion furnaces
Low pressure and atmospheric pressure CVD furnaces
Several vacuum evaporation systems
Plasma processing systems
Fabrication monitoring equipment
Mask aligner and photolithography
Reactive Ion Etch (RIE) System
Electron-Beam-Lithography system
Class 100 clean benches
Hot-Wire CVD system

Contact Detail :
Microelectronics Group
Department of Electrical Engg.
Indian Institute of Technology Bombay
Powai, Mumbai 400 076, India
Tel No: 91-22-25764482 Fax: 91-22-25723707
Email: me@ee.iitb.ac.in